Ionization and Excitation Processes in Analytical Plasma of Gdoes and Gdms Systems Working in Pulsed Rf Regime

نویسندگان

  • A. SURMEIAN
  • C. DIPLASU
  • A. GROZA
  • P. CHAPON
  • A. TEMPEZ
  • M. GANCIU
چکیده

The GDOES and GDMS analytical systems working in Pulsed RF regime have some distinct advantages compared to non-pulsed glow discharge analytical systems. In this paper we report a rise in MS ionic signals, and in emission atomic lines of analysts in the beginning of the afterglow of RF pulsed GD sources. Making experimental studies with Langmuir probe we demonstrate that the ionization and excitation processes in the early afterglow of the RF pulsed GD involve the metastable atoms of the working gas.

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تاریخ انتشار 2011